Specifications : Pumping Speed (l/s) For N2 35 Pumping Speed (l/s) For Ar 8 Starting pressure (Torr) < 5 x 10-3 Ultimate pressure (Torr) 5 x 10-10 Baking temp. With magnets (C) 250 Connecting flange NB 63 CF Magnetic Field (Gauss) 1200 Stray magnetic field at flange (Gauss) <2 No. Of Sputtering assemblies 1 Max. Operating Voltage (kV) 6.2 Short ciruit current (mA) 100 Weight (kg.)
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